Thermochemical Data on Gas Phase Compounds of Sulfur, Fluorine, Oxygen
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JT Herron
J. Phys. Chem. Ref. Data, 1987
srd.nist.gov
Detailed modeling of the physical and chemical processes occurring in plasmas, chemical vapor deposition, and dielectric breakdown of sulfur hexafluoride requires an eval-uated thermochemical and kinetic data base. This review provides a thermochemical data base applicable to the prob-lem of dielectric breakdown in sulfur hexafluoride, an im-portant gaseous insulator used in large switches and other lıiglı-voltage ulevices. The starting point for this review is the earlier review of Benson