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A novel microelectromechanical system (MEMS) design for an underwater acoustic field sensor复制

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DOI: 10.1121/1.424817复制

文献链接: https://pubs.aip.org/jasa/article/105/2_Supplement/998/556877/A-novel-microelectromechanical-system-MEMS-design复制

其他信息:

出版社: Acoustical Society of America (ASA)
作者: Thomas G. Bifano; Robin O. Cleveland; Debora A. Compton; Allan D. Pierce
全文下载地址: https://pubs.aip.org/jasa/article/105/2_Supplement/998/556877/A-novel-microelectromechanical-system-MEMS-design

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