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Microtexture Dependence of Mechanical and Electrical Properties of Gold Thin Films Used for Micro Bumps of 3D Stacking Structures复制

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DOI: 10.1115/imece2020-23441复制

文献链接: https://asmedigitalcollection.asme.org/IMECE/proceedings/IMECE2020/84652/Virtual,%20Online/1099529复制

其他信息:

出版社: American Society of Mechanical Engineers
作者: Genta Nakauchi; Shota Akasaki; Hideo Miura
全文下载地址: http://asmedigitalcollection.asme.org/IMECE/proceedings-pdf/doi/10.1115/IMECE2020-23441/6638449/v013t13a002-imece2020-23441.pdf

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