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期刊论文Evaluation of the effect of hydrogen plasma treatment on the chemical bonding state and distribution of hydrogen in silicon nitride films by angle-resolved hard X-ray photoelectron spectroscopy复制

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DOI: 10.35848/1347-4065/ada9f7复制

文献链接: https://iopscience.iop.org/article/10.35848/1347-4065/ada9f7复制

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