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Nano-diffractive elements in BSI pixel CMOS image sensors: optical design and process integration co-optimization with pixel scaling复制

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DOI: 10.1117/12.2609360复制

文献链接: https://www.spiedigitallibrary.org/conference-proceedings-of-spie/12004/2609360/Nano-diffractive-elements-in-BSI-pixel-CMOS-image-sensors/10.1117/12.2609360.full复制

其他信息:

出版社: SPIE
作者: Marios Barlas; Axel Crocherie; Felix Bardonnet; Quentin Abadie; Elodie Sungauer; Matteo Vignetti; Bastien Mamdy; Isobel Nicholson; Patrick Gros d'Aillon; Raul-Andres Bianchi; Gabriel Mugny; Dominique Golanski; Florian Domengie; Pascal Besson; Emilie Prevost; Linda Parmigiani; Jihane Arnaud; Helene Wehbe-Alause; Arnaud Tournier; Olivier Noblanc; Krysten Rochereau

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