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Tailoring indium oxide film characteristics through oxygen reactants in atomic layer deposition with highly reactive liquid precurso复制

用户NryHlAVH_iBM 3个月前 163 10 已关闭

DOI: https://doi.org/10.1016/j.apsusc.2024.160271复制

文献链接: https://www.sciencedirect.com/science/article/abs/pii/S016943322400984X?via=ihub复制

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