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期刊论文Advances and challenges in chemical mechanical polishing of silicon carbide: materials, mechanisms, and future directions复制

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DOI: 10.1039/d5tc03256c复制

文献链接: https://pubs.rsc.org/tc/article/13/46/22921-22952/316007复制

其他信息:

出版社: Royal Society of Chemistry (RSC)
作者: Ailin Li; Jiakai Zhou; Xinhuan Niu; Ziliang Liu; Qing Ma; Shaobo Song; Mengqi Wang; Bin Hu

上一篇：Revolutionizing Chemical Mechanical Polishing with Machine Learning: A Comprehensive Review of Challenges and Opportunities

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2026-09-05 17:16:35 [完结求助]

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