Etch Process Development of Tantalum Pentoxide (Ta2O5) using Photoresist (S1813)
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MS Ilango, MD Charlton, V CC
Nanoscience and Nanotechnology …, 2013
academia.edu
… ) and as well the selectivity between Ta2O5 and photoresist. Since this is manual dicing, …
is about etching of Ta2O5 using different etching chemistry in Reactive Ion Etching (RIE). Each …
