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Bottom-Up Design of a Supercycle Recipe for Atomic Layer Deposition of Tunable Indium Gallium Zinc Oxide Thin Films复制

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DOI: 10.1021/acsaelm.4c00730复制

文献链接: https://pubs.acs.org/doi/10.1021/acsaelm.4c00730复制

其他信息:

出版社: American Chemical Society (ACS)
作者: Carlos Morales; Paul Plate; Ludwig Marth; Franziska Naumann; Małgorzata Kot; Christoph Janowitz; Peter Kus; Marvin Hartwig Zoellner; Christian Wenger; Karsten Henkel; Jan Ingo Flege
全文下载地址: https://pubs.acs.org/doi/pdf/10.1021/acsaelm.4c00730

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