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Deposition Kinetics and Characteristics of Peald Igzo Films Using Tetrahydrofuran-Adducted in & Ga Precursors复制

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DOI: 10.1149/ma2024-01301515mtgabs复制

文献链接: https://iopscience.iop.org/article/10.1149/MA2024-01301515mtgabs复制

其他信息:

出版社: The Electrochemical Society
作者: Samdong Lee; Sang-Yong Jeon; Gyun-Sang Lee; Yong-Hee Kwone; Young-Jae Im; Tae-Seok Byun; Sang-Ick Lee
全文下载地址: https://iopscience.iop.org/article/10.1149/MA2024-01301515mtgabs/pdf

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