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Dielectric antireflective coatings for DUV lithography复制

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C Bencher, C Ngai, B Roman, S Lian, T Vuong
Solid state technology, 1997
go.gale.com
… , the design of these ARCs can be made available to any semiconductor manufacturer for
numerous … ARC was designed for aluminum metallization at DUV (248-nm) wavelengths. This …

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