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期刊论文Study of the inductively coupled plasma assisted DC magnetron sputtering (ICPDMS) during ITO deposition复制

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DOI: https://doi.org/10.1016/j.tsf.2009.02.032复制

文献链接: https://linkinghub.elsevier.com/retrieve/pii/S0040609009002600复制

其他信息:

出版社: Elsevier BV
作者: Ie Hong Yang; Youjong Lee; Jin Nyeung Jang; MunPyo Hong

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